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  • 产品名称：带滑动法兰三温区CVD系统

  • 产品型号：OTF-1200X-5-III-F3LV
  • 产品厂商：MTI
  • 产品价格：0
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简单介绍：
OTF1200X-5-III-F3LV is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. Th 带滑动法兰三温区CVD系统OTF-1200X-5-III-F3LV可以快速加热至1200℃，并通过调整三个温区而建立不同梯度的热场，可进行退火、扩散、在不同气氛中烧结样品及CVD等实验。
详情介绍：

OTF1200X-5-III-F3LV is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.

  • One 5" O.D x 1400mm L fused quartz tube and one pair of vacuum sealing flanges with pressure gauge.
  • Three 30 segments temperature controllers are installed with K type thermal couple. Microprocessor-based self-tuning PID control provides excellent control without overshootingand +/- 1 oC accuracy. 
  • 800mm long sliding rail is installed with one end flange to make loading & unload sample at easy.
  • Two mobile carts are included to support furnace and sliding rail.
  • Three flowmeters (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed in one of mobile cart, which allow to use three types of gas during heat treatment.
  • One mechanical pump with KF25 adaptor and SS pipe are included with furnace.
  • One digital vacuum gauge is installed on the flange for easy vacuum pressure reading upto10 -4 torr.
  • Click picture below to enlarge and to see details. 

 

 

digital vacuum gauge,
 SS vacuum pipe & ball
valve with KF25 adaptor 
 garantee 10-2 torr vacuum 
 
2" Quartz boat sitting on the
slide rail holder is ready used
for diffusion, oxidation and anneal.
5" Quartz tube can
accommodate 4" quartz
wafer boat without  holder.

 

Specifications:
 

Furnace structure

  • Double layer steel case with two cooling fan, which ensures low surface temperature.
  • Energy saving high purity fibrous alumina insulation.
  • One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge.
  • One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included. 

 Voltage & Power

  • AC 208-240V Single Phase, 50/60 Hz  (40A breaker required).
  • Powder cord is included without plug.
  • 7 KW Max.

 Max. Temperature

 1200 oC

 Continuous Temperature

 1100 oC

 Max. Heating Rate

 <= 20 oC /min

 Tube Size and Flange

  • 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included.
  • Vacuum flanges with valves and pressure gauge are included.  Click picture below to see details.

 Heating Zone Length

Three zones: (900mm, 36" in total)

·        Zone 1: 229mm  (9")

·        Zone 2: 457mm  (18.0")

·        Zone 3: 229 mm (9")

Constant Temp. Zone

  • If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within +/- 1oC
  • If using one zone (center zone),  constant temperature zone is 4.3" (110 mm) length within +/- 1oC

 Temperature Controllers

  • Three Digital Controllers, and each has 30-segement 
  • Built in protection from over-heated and broken thermo couple

 Temperature Accuracy

 +/- 1oC

 Heating Element

 Fe-Cr-Al Alloy doped by Mo

 Dimension

 1080 X 430 x 600mm

 Net Weight

 about 70 kg

 Warranty & Certificate

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certificate

Shipping package size after crating

 65x45x35" ( x2)

Shipping weight

 290 lbs

 Mobile Cart & Flow meters

Two mobile carts are included. Gas mixing controls (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment.

 功能特点
  • 双层壳体，配有冷系统，炉体采用高纯度氧化铝多晶纤维保温材料。
  • 内炉膛表面涂有美国进口氧化铝涂层，可以提高反射率和保护炉膛洁净度。
  • 一端法兰配有滑轨，便于样品装卸；另一端法兰装有数字真空计。
  • 采用三个独立PID控制器 ，可以设置30段升降温程序，设有过热和断偶保护功能。
  • 已通过CE认证。
  技术参数
安装条件 本设备要求在海拔1000m以下，温度25℃±15℃，湿度55%Rh±10%Rh下使用。
水 不需要
电 AC220V 50Hz，必须有良好接地
气 设备腔室内需充注气体，需自备气瓶气源
工作台 尺寸1600mm×600mm×700mm，承重150kg以上
通风装置 需要
电源 单相AC 208-240V 50/60Hz 7KW （40A保险丝）
石英管 外径Ø125mm，内径120mm，长1400mm，带有一对真空密封法兰
加热元件 掺钼铁铬铝合金电阻丝
加热区域 温区I长229mm，温区II长457mm，温区III长229mm，总长915mm
恒温区域 三个温区为同一温度时为625mm，温区II为110mm
工作温度 *高1200℃，连续工作1100℃
*大升降温速率 20℃/min
控温精度 ±1℃
热电偶 K型
浮子流量计 3个，量程0-100ml/min、0-160ml/min、0-250ml/min
数字真空计 10-4torr
管式炉尺寸 1080mm×430mm×600mm
重量 70kg

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