产品详情
  • 产品名称:高真空快速退火炉

  • 产品型号: RTP-1000D4HV
  • 产品厂商:MTI
  • 产品价格:0
  • 折扣价格:0
  • 产品文档:
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简单介绍:
RTP-1000D4HV is a compact rapid thermal processing tube (4" I.D.) furnace with Compact Turbomolecular Vacuum Pump Station and KF-D25 vacuum flange. It is designed for annealing semiconductor wafer or
详情介绍:

RTP-1000D4HV is a compact rapid thermal processing tube (4" I.D.) furnace with Compact Turbomolecular Vacuum Pump Station and KF-D25 vacuum flange. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. Such furnace is heated by 10KW halogen light around the processing tube with max. heating rate at 120oC/second. 50 segments precision temperature controller is built in with accuracy +/-1oC. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
 

 

 

Specifications:

System structure&size

 

·         Compact 4“ RTP Tube FurnaceDouble layer steel case mullite liner

·         Compact Turbomolecular Vacuum Pump Station (up to 1E-7 mbar)

·         600mm x 600mm Heavy Duty Mobile Cart

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Heating zone

12" length with 4" constant temperature zone within +/-1oC uniformity

Quart Tube & Sample Holder

  • Quart Tube Size: 4.33" O.D x 4.05" I.D x 15" Length
  • 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
    • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
    • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
    • The sample holder is removable from flange and use the RTP for other purpose

Vacuum Flange

KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Water Cooling Jacket & Recirculating water chiller

  • You must implement cooling water during operation.
  • You must run test under vacuum or inert gas environment, otherwise the heat radiation blocks will get oxidized. 
  • Please make sure the flow rate  of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
  • We suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.
  • You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
  • Warning 1: With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
  • Warning 2: With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Compact Turbomolecular
Vacuum Pump Station (Please click the picture for details of  product information
 
 
 
World-famous Pfeiffer vacuum station made in Germany consists of diaphgram pump, turbomolecular pump, vacuum pressure sensor and LED digital control&display:
  • Ultimated Vacuum Degree: < 1 E-8 mbar 
  • Working Range: From 1000 mbar to 1E-7 mbar
  • Digital vacuum display shows the instant vacuum degree.
  • Precision vacuum sensor, ball valves, SS vacuum bellow are included and ready to use.
  • Vacuum Level inside the quartz tube can reach 2.25 x 10-4 torr within 20 minutes.
  • Turn-key Operation.
  • Please click picture lefy to see complete accessories included with the pump

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type

Programmable Temperature controller

  • Built in protection from overheated and broken thermal couple
  • 30 programmable segments
  • Auto tune function
  • Temperature control accuracy: +/- 0.5oC
  • Built in RS485 port for PC control
  • Software is included. (Computer is not included)
  • One 15" screen laptop with operation software installed is available as option at $900 extra cost.         
  • Click here to download the driver and software

Max. Heating Rate

50 oC/sec recommended, and 120oC/sec. for short time   ( furnace must preheated at 200oC for 10 20 minutes to get max heating rate )

Max. Cooling Rate

64 oC/min (Under vacuum: 200 mtorr), 117oC/min (Under atmosphere pressure)

Working Temperature

1100oC Max.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

Dimension

RTP Furnace: 760 X 330 X 530 mm (30"W x 13"L x 21" H); Vacuum Station:

Net weight

60 kg (132 lbs)

Warranty & Certificate

  • One year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings and halogen lamp are not covered by the warranty, please order the replacement at related products below.)
  •   CE certified
 
 
 
 

 
KF-D25 high vacuum flange was installed for immediate use
  

 

Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover

 

 

 
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.

 

Click to see detail specification
 
 

user-friendly software

           
     
Temperature control software is included. Please click picture to enlarge and review interface