OTF-1200X-4-III-9HV is CE certifed 4" diameter split three zone tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion.
Specifications:
Furnace Structure |
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Power |
7 Kw |
Voltage |
AC 208-240V Single Phase, 50/60 Hz |
Heating Element | Fe-Cr-Al Alloy doped by Mo |
Max. Temperature |
1200 oC |
Continuous Temperature |
1100 oC |
Max. Heating Rate |
<= 20 oC /min |
Tube Size and Materials |
100 mm O.D x 92 mm ID. x 1400 mm fused quartz tube included |
Heating Zone length |
Three zones: (880mm, 35" in total) Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm |
Constant temperature zone | 20" (500 mm) length (three zone at equal temperature within +/- 1oC) |
Temperature controllers |
Operation Manual |
Thermal Couple |
Three K type thermal couples built in |
Vacuum Flanges
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Vacuum pumps |
Tow stages vacuum pump installed in bottom case:
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Vacuum Sensor & display |
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Gas flow meter
( click to enlarge ) User Manual (Click to download)
software(click to download)
Multi-DMFC V1.02
Single V1.12
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Pipe connection, valves and gas mixer |
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Dimension |
Furnace: 550 x 380 x 520 Bottom Mobile case: 800x600x597 |
Net Weight |
about 100 kg |
Shipping weight |
350 Lbs |
Shipping package size after crating |
Two pallets |
Warranty & Certificate |
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